MicroWriter

ML®3

The MicroWriter ML®3 products are a range of photolithography machines designed for rapid prototyping and small volume manufacturing in R&D laboratories and clean rooms. Conventional approaches to photolithography are usually based on exposing through a chromium-glass mask manufactured by specialist vendors. In R&D environments it is often necessary to change the mask design frequently. Direct-write lithography tools overcome this problem by holding the mask in software. Rather than projecting light through a physical mask, direct-write lithography uses computer-controlled optics to project the exposure pattern directly onto the photoresist.

The MicroWriter ML®3 family comprises three compact, high-performance, direct-write optical lithography machines which are designed to offer unprecedented value in a small laboratory footprint.